Technology: Transducers

Overview Transducers Electronics Packaging Software Applications

Infineon CAPACITIVE MUTs

• Compliant poly-Si membrane sandwiched between two highly perforated stiff backplate (BP) electrodes
• Capacitive read out of membrane movement in receive mode
• Electrostatic actuation of membrane during transmit mode

Device performance:

• Working in audio range as high performance audio microphone
• High sensitivity ultrasonic receiver in range up to 100 kHz
• Ultrasonic speaker up to 100 kHz

Sintef PIEZOELECTRIC MUTs on Si

• AlN thin-film based bulk micromachining process
• AlN deposition with excellent film orientation
• Cantilever based ultrasound microphones
• Multi-layer thin-film stack

Expected device performance:

• Microphone with high SNR using AlN thin-film for sensing

POLYMER PMUTs

IMEC PMUTs on glass

• All process steps on glass substrates and compatible to display technology
• Actuation using piezoelectric polymer
• Resonance frequency set by membrane diameter from 100kHz to 1MHz
• Array uniformity improved by design

• PMUT array (7x7)

TNO PMUTs on flex

• Printed membrane transducers on flexible substrate
• Thin (<0.25mm) and light weight, cost-effective scaling to large area

New materials

• Composite piezoelectrics with ceramic filler (KNLN3) and polymer matrix (PDMS)

New deposition techniques

• AlN thin film deposition by Pulsed Laser Deposition