Article "Mechanical Characterization of MEMS-Microphones by Means of Nanoindentation and Coupled Finite Element Analysis"

  • Posted on: 19 January 2019
  • By: Admin

An article dedicated to Silense project: Albrecht, J., Weissbach, M., Vobl, M., Krumbein, U. and Rzepka, S., 2018, December. Mechanical Characterization of MEMS-Microphones by Means of Nanoindentation and Coupled Finite Element Analysis. In 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) (pp. 580-584). IEEE.

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